PVT-RS-35(A/D)

Electrical Resistance Heating SIC Crystal Growth Furnace with Dual Heaters


Used for 6/8/12 inch conductive and high purity semi-insulating SiC crystal growth, the multi-heater design allows flexible process and hot zone options, the top loading structure enables convenient furnace loading and maintenance operations, while the equipment has high-precision temperature and pressure control capabilities with stable and excellent process performance.

Intelligence


An automated production line for the crystal growth can be customized according to customers' needs.
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Product Features

 

Compact structure

The furnace structure is compact and can be arranged side by side, which improves the utilization rate of the workshop.

Dual-control mode is more energy-efficient

The heating control mode can be freely selected between the power control mode and the temperature control mode.

Independent control is convenient for temperature adjustment

There are dual heaters with independent control, which is convenient for adjusting the temperature gradient.

Meets the growth requirements of 6/8-inch SIC crystal

It can meet the growth requirements of 6/8-inch semi-insulating/conductive SIC crystals.

Precise rotation ensures uniform temperature

The seed crystal shaft has a rotation function with an accuracy of ±0.01 rpm, which is convenient for creating a radially uniform temperature environment and meeting the growth requirements of thick crystals.

Intelligent algorithms ensure control accuracy

The equipment control system adopts a variety of advanced algorithms, achieving high control accuracy.

Intelligence

An automated production line for the crystal growth can be customized according to customers' needs.

 


Technical Parameters


Model PVT-RS-35(A/D)
Dimensions: L x W x H 2600X3000X3800mm
Loading method Top loading
Optional Configuration Hot Zone and Basic Process Package

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