PVT-RS-40

Electrical Resistance Heating SIC Crystal Growing Furnace


Used for 6/8/12 inch conductive and high purity semi-insulating SiC crystal growth, the multi-heater design allows flexible process and thermal field settings, the top loading structure enables convenient open-loading furnace and maintenance operations, while the equipment has high-precision temperature and pressure control capabilities, stable and excellent process performance.

Intelligent operation


One-click start-up, centralized monitoring, minimized staffing, and customizable automated crystal growth production lines.
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Product Features

 

Mature thermal field design

Axial-radial separation facilitates defect control; optimized radial thermal gradient enables low stress and low cracking rate, crystal thickness up to 20-30 mm.

Process compatibility

Equipped with multiple independently controlled heaters for precise temperature gradient adjustment.

Intelligent operation

One-click start-up, centralized monitoring, minimized staffing, and customizable automated crystal growth production lines.

Additional advantages

Modular loading/unloading design, long hot zone lifestime, stable crucible lifting mechanism, anti-interference power supply with ultra-high stability.

 


Technical Parameters


Model PVT-RS-40
Dimensions: L x W x H 2550x2550x3460mm
Heating mode Resistance Heating
Optional Configuration Dual temperature measurement points, multiple heaters

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