Products and Services


The company's business areas involve semiconductor and solar PV monocrystalline silicon growth and silicon wafer cutting and grinding equipment, solar PV silicon wafers, cell cleaning, texturing, etching, module string welding, stack welding equipment, semiconductor thin film growth equipment (ALD) PECVD, LPCVD, etc., new semiconductor material crystal growth and cutting and grinding equipment such as sapphire and SiC, as well as silicon material microwave heating and crushing, argon gas purification and recovery equipment. At the same time, the company has the ability to provide solutions and software and hardware delivery for solar PV smart manufacturing and smart factories under the background of Industry 4.0.

Continuous charging czochralski single crystal furnace
CNC Roller Mill LQ003PF
CNC surface grinder LQ016/LQ018
SiC induction grower
SiC resistance heating crystal grower
SiC tube synthetic furnace
SiC cropper LQJD3010
Anneal furnace VAF600

Continuous charging czochralski single crystal furnace


Main technical specification
1. Machine size: (LWH) 2000×2300×10800m;
2. The inner diameter of the main chamber is 1400mm, and the inner diameter of the auxiliary furnace is 350mm; compatible with 24~34 inch RCz and 32~34 inch CCz thermal fields, and can pull crystals with a diameter of less than 10 inches;
3. Heating method: resistance heating, DC power supply Pmax=150:50Kw, frequency 50Hz;

CNC Roller Mill LQ003PF


Main technical specification
1. Processing crystal rod diameter: 4~8 inches
2. Processing crystal rod length: ≤400mm
3. Ovality: ≤0.05mm

CNC surface grinder LQ016/LQ018


equipment advantages
The main components are all of well-known brands, high stability and durability.
The precision P3 ball screw drive is adopted, with high precision.
The castings are made of high grade gray cast iron, which has better bending and torsional stress resistance.
Optional three-stage filtration tank or paper belt filter to keep the cutting fluid clean, improve machining performance and tool life, and reduce environmental pollution.
The hard rail is scraped and polished by hand, and the guide rail joint surface is plastic-coated to reduce the damping coefficient and improve the machine tool precision.
Optional conventional, intensive and integrated electromagnetic chucks, strong versatility.

SiC induction grower


Design advantages
1、Meet 6 "/8" crystal growth;
2、One-button intelligent start, reduce manual intervention, conducive to large-scale production.
3、PVT-MF-50 silicon carbide induction grower is suitable for growing high-quality six inch silicon carbide single crystal, high purity silicon carbide raw material synthesis, crystal annealing and other fields.

SiC resistance heating crystal grower


Design advantages
1、Compact structure, side-by-side layout can be used to improve the utilization rate of the plant.
2、Satisfy 6-8 inch semi-insulating/conducting crystal growth needs.
3、PVT-RS-40 silicon carbide resistance heating crystal grower is suitable for growing high-quality 6-8 inch silicon carbide single crystal, high purity silicon carbide raw material synthesis, crystal annealing and other fields.

SiC tube synthetic furnace


Design advantages
1、It fills the equipment gap specially used for synthetic raw materials in the market and improves the efficiency of raw material synthesis.
2、One-button intelligent start, reduce manual intervention, conducive to large-scale production.
3、Compact three-dimensional machine design, convenient layout, improve the utilization rate of the plant.

SiC cropper LQJD3010


Design advantages
1、The equipment can apply 30m/s high wire speed for stable cutting, with high cutting efficiency and high output ratio;
2、The equipment can choose the processing method of rotation, wire swing or material swing by itself to better achieve the various requirements of the process;
3、The processing precision of the equipment is high, and the average TTV of the truncated sample is ≤30μm,exceeding the average level of industry;
4、The equipment can use 0.18mm diamond wire stably,with accurate tension control and excellent fine wire control on material loss;
5、The equipment uses the highest level IS810 series controller of Inovance, and is equipped with 13 high-precision servo motors;
6、The take-up and pay-off systems are arranged on the left and right sides of the machine, which effectively reduces the impact of vibration and greatly improves the machining accuracy.

Anneal furnace VAF600


Design advantages
1、Equipment structure is compact;
2、Adopting ring heating structure, the temperature uniformity of the furnace body is good.
3、Automatically adjusting the temperature.
4、Precise vacuum control.
5、the product is compatible with a wide range of products,changing the vehicle according to the size of the product makes it easy to change the model.
Continuous charging czochralski single crystal furnace
CNC Roller Mill LQ003PF
CNC surface grinder LQ016/LQ018
SiC induction grower
SiC resistance heating crystal grower
SiC tube synthetic furnace
SiC cropper LQJD3010
Anneal furnace VAF600

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