HTSG-RS-760

Liquid Phase SIC Crystal Growing Furnace


Suitable for producing high quality 6-inch and 8-inch SIC crystal growth

Intelligent Control


Suitable for producing high quality 6-inch and 8-inch SIC crystal growth
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Product Features

 

Intelligent Control

Multiple preset crystal growth methods , one-click switching is available.

Excellent Process Compatibility

Equipped with dual heaters that can be independently controlled, making it easy to adjust temperature gradients.

Strong Operational Stability

The water-cooled crucible shaft and seed crystal axis rotate smoothly; pressure and temperature are precisely controlled in a closed loop.

Additional Advantages

Convenient heat field installation, detection of seed crystal melt surface contact, and visual detection of melt surface level.

 

 

Technical Parameters


Model HTSG-RS-760
Dimensions: L x W x H 3000X2600X4700mm
Temperature control accuracy ±1℃
Loading method Top loading
Optional Configuration Hot Zone and Basic Process Package

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