CSG-PC-110
Vertical induction furnace for silicon carbide synthesis
SIC Powder purity ≥6N.
Large loading capacity
Product Features
Large loading capacity
Large loading capacity at one time, which can realise 1 set of equipment to supply multiple crystal furnaces and improve production efficiency.
Co-frequency power temperature control
Adopt 1 towing 2 co-frequency power, can effectively control the axial temperature gradient.
Infrared temperature measurement
Top and bottom can be equipped with infrared temperature measurement, which is convenient for temperature monitoring and process adjusting.
High vacuum precision
High vacuum, high pressure control precision, high temperature control precision, to meet the synthesis of high-purity SIC raw materials.
Safe loading and unloading
Adopting the loading and unloading method of upper inlet and lower outlet, which is safe and reliable, and can be equipped with unloading forklift.
Precise control of pressure and atmosphere in the furnace
Adopting high-precision butterfly valve and mass flow meter to control the pressure in the furnace and provide stable process atmosphere.
Side-by-side arrangement saves space
The equipment can be arranged side-by-side to save space and improve the utilisation rate of the plant.
Technical Parameters
| Dimensions: L x W x H | 4340x3560x4300mm |
| Furnace chamber diameter | 1100mm |
| loading volume | 50kg |
| Ultimate vacuum | 10-2Pa (2h after molecular pump startup) |
| Chamber pressure rise rate | 100pa/12h |
| Lower lid lift stroke | 1500mm |
| Heating mode | Induction heating |
| Maximum temperature inside the furnace | 2400℃ |
| Heating power supply | 2X40KW |
| Temperature measurement method | Two-color infrared temperature measurement |
| Temperature range | 900~3000℃ |
| Temperature control precision | ±1℃ |
| Pressure control range | 1~700mbar |
| Pressure control accuracy | 1~5mbar ±0.1mbar 5~100mbar ±0.2mbar 100~700mbar ±0.5mbar |
| Loading method | Bottom loading |
| Optional Configuration | Dual Temperature Measurement Points, Unloading Forklift |
Related Products
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
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