PVT-RS-800
Electrical Resistance Heating SIC Crystal Growth Furnace with Single Heater
Precise rotation ensures uniform temperature
Product Features
Compact structure
The furnace structure is compact and can be arranged side by side, which improves the utilization rate of the workshop.
Dual-control mode is more energy-efficient (30kW)
The heating control mode can be freely selected between the power control mode and the temperature control mode. The furnace power is reduced to about 30kW, which is energy-saving and eco-friendly.
Larger hot zone improves thickeness
The effective hot zone is large, which is beneficial for growing thicker SIC crystals.
Molecular pump is suitable for large sizes
Equipped with a molecular pump to meet the growth requirements of 6/8-inch semi-insulating/conductive SIC crystals.
Precise rotation ensures uniform temperature
The crucible shaft has a rotation function with an accuracy of ±0.01rpm, which is convenient for creating a radially uniform temperature environment and meeting the growth requirements of thicker crystals.
Intelligent algorithms ensure control accuracy
The equipment control system adopts a variety of advanced algorithms, resulting in high control accuracy.
Technical Parameters
| Model | PVT-RS-800 |
| Dimensions: L x W x H | 3100X3200X3000mm |
| Loading method | Top loading |
| Optional Configuration | Hot Zone and Basic Process Package |
Related Products
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
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