03-01
Continuous charging czochralski single crystal furnace
1. Machine size: (LWH) 2000×2300×10800m;
2. The inner diameter of the main chamber is 1400mm, and the inner diameter of the auxiliary furnace is 350mm; compatible with 24~34 inch RCz and 32~34 inch CCz thermal fields, and can pull crystals with a diameter of less than 10 inches;
3. Heating method: resistance heating, DC power supply Pmax=150:50Kw, frequency 50Hz;
Main technical specification
1. Overall size: (LWH) 2000×2300×10800m;
2. The inner diameter of the main chamber is 1400mm, and the inner diameter of the auxiliary furnace is 350mm; compatible with 24~34 inch RCz and 32~34 inch CCz thermal fields, and can pull crystals with a diameter of less than 10 inches;
3. Heating method: resistance heating, DC power supply Pmax=150:50Kw, frequency 50Hz;
4. Loading method: main furnace chamber lateral continuous external feeding device (capacity 1200kg) + dynamic online silicon material supplement device + pre-loaded in quartz crucible; the feeding speed can be linearly adjusted within the range of 20g-600g/min, and the control accuracy is ≤500g/Hours.
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Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
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