KX380-650P

Czochralski Crystal Growing Furnace for Semiconductor Silicon Parts


For 24-inch semiconductor grade silicon ingot growth

Water-cooled ring


For 24-inch semiconductor grade silicon ingot growth
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Product Features

 

Large diameter monocrystal furnace

The world's first 24-inch monocrystal silicon furnace.

Large diameter rotary vane valve

Effectively reduces the height of the equipment and improves stability.

Advanced control algorithms

Ensure crystal quality.

Water-cooled ring

Improve production efficiency.

Reserve space for magnetic field installation

For magnetic field lifting instrument installation.

Maximum crystal diameter

Max~φ550mm.

 

 

Technical Parameters


Model KX380-650P
Chamber Diameter Φ1600mm
Diameter of secondary chamber 650mm
Throat diameter of rotary vane valve Φ500~650mm
Diameter of Crystal Body Max~Φ550mm
Dimension of hot zone Min~32inch-Max~40inch

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