CCz-1600
Continuous Czochralski Crystal Growing Furnace
Automatic continuous loading
Product Features
Automatic continuous loading
Continuous feed rate linearly adjustable, real-time feed rate fluctuations <±10g/min
High doping coefficient
automatic continuous doping system，linkage closed-loop control, dynamic and proportional continuous solid doping, effective doping coefficient is 2~3 times higher than the meteorological doping process.
Precise resistivity control
Achieve precise resistivity control of narrow resistivity distribution of silicon crystals, resistance of crystals uniformlty distribute at radial and axial direction.
Production advantage
Production capacity increase does not depend on the crucible feeding volume, furnace, hot field size expansion and other conventional methods, high production efficiency and low cost.
Self-developed supporting process results
① 10-inch gallium-doped P-type crystals: Axial resistivity 0.6-0.7ohm.cm, radial resistivity RRG＜6.0%.
② 8-inch phosphorus doped N-type ultra-low resistance crystal: Head resistivity <0.001ohm.cm, radial resistivity RRG <6%.
Technical Parameters
| Machine dimensions | (LWH)2000X2300X10800mm |
| Loading capacity | 1000kg （customizable） |
| Dopant system | High precision continuous on-line solid dopanting, control accuracy ±0.01g |
| Diameter inside main chamber: 1400mm Diameter inside the secondary chamber: 350mm |
Compatible with 24~34 inch RCZ and 32~34 inch CCz hot zone, can make ingot up to 10 inches in diameter |
| Heating method | Resistance heating, DC power supply Pmax=150:50kW. |
| Loading method | Lateral continuous external charging device in the main chamber (capacity 1200kg) + dynamic on-line silicon replenishment device + pre-loading in the quartz crucible; loading speed can be linearly regulated within the range of 20g-600g/min, control accuracy ≤ 500g/ h |
Related Products
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
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