KX360MCZ
12-inch Czochralski Single Crystal Growing Furnace with Superconducting Magnetic Field
Structural stability
Product Features
Structural stability
The structure of the equipment adopts finite element analysis design, higher safety and excellent operational stability and repeatability.
Clean chamber
The chamber is made of 316L stainless steel, 360° mirror surface polishing, clean and easy to clean to ensure the environment of high purity crystal growth.
Precise control
The use of advanced control algorithms and vision algorithms, the effective diameter control range up to the target diameter ± 0.05mm.
One-click operation
One-click hardware and software control logic, accurate protection monitoring and warning system to support the continued efficient and stable operation of the equipment.
Magnetic field compatibility
Hardware and software reserved interfaces are compatible with advanced superconducting level magnetic field from different vendors.
Accurate pressure
High-precision butterfly valve and mass flow meter with active self-cleaning exhaust gas filtration system, the chamber pressure can be controlled in a larger and more accurate range.
Adjustable heater
Equipped with heater lifting mechanism, providing more possibilities for process window adjustment (optional).
Technical Parameters
| Model | KX360MCZ |
| Chamber Diameter | Φ1400mm |
| Height of secondary chamber | 3500-5000mm（customizable） |
| Secondary chamber diameter | Φ400mm |
| Field of application | 300mm COP free Crystal Manufacturing |
| Maximum crystal body diameter | 12 inch |
| Hot zone Size | Min~32inch-Max~36inch |
| Type of magnetic field | Horizontal superconducting magnetic field is standard, other types are available upon request. |
| Loading volume | 650kg |
Related Products
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
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