KX-H-VPF312818-2200
High-temperature purification furnace
Remove impurities such as metal, boron, silicon, calcium, iron, and aluminum (B, Si, Ca, Fe, Al) from graphite pieces, soft and hard felt, and carbon-carbon composite materials to produce ultra-high purity graphite, which is mainly used in semiconductor and photovoltaic thermal field components.
Ultra-High Purity Graphite
Product Features
Furnace chamber
Effective volume: 2×2×9.6m
Insulation
Thermal conductivity of insulation layer:0.25W/(m·k)@1,080°C; Thickness of insulation layer:210mm.
Temperature resistance
Maximum operating temperature: up to 2,200°C.
Product size
Product width/diameter: up to 2 m.
Production capacity
Maximum loading capacity: 5 tons.
Impurity removal effect
Graphite parts with impurity content of 200 PPM，after high-temperature purification have impurity content lower than 20 PPM.
Technical Parameters
| Loading method | Horizontal, intermittent, single-sided in/out material |
| Design temperature | 2,400 ℃ |
| Maximum operating temperature | 2,200 ℃ |
| Heating rate | 1 - 5℃/min |
| Temperature control accuracy | 0.1 ℃/min |
| Temperature uniformity | ± 15 ℃ |
| Rated power | 1,300 kW |
| Intake speed | 2100 L/min |
| Intake method | One side is for intake, the other side is for exhaust. There are 12 intake pipes evenly distributed, and each intake pipe leads to 5 intake ports inside the furnace. |
| Absolute vacuum | <50 Pa |
| Pressure rise rate | ≤5 Pa/h |
| Failure rate | ≤ 1%，Failure rate= Equipment downtime / Load time × 100% |
| Equipment footprint | L25 × W10 × H7m |
| Required net space | L27 × W12 × H8m |
| Dimensions of the furnace chamber | 10.7 × 3.1 × 2.8m |
| Effective working area space | 9.6 × 2 × 2m |
| Total equipment weight | 80 tons（Approximately） |
| Maximum net loading weight (before entering the furnace) | 5 tons |
| Overall appearance of the equipment body | Grayish white, according to China color standard chart RAL9002 |
Facility parameters
| Environment | Environmental temperature: 5℃ to 35℃ |
| Cooling water: Deionized water, high-level water storage tank | |
| Water pressure: 0.15 MPa to 0.3 MPa; Water flow rate: 220 m³/h | |
| Power Supply: Three-phase 380 VAC @ 50Hz, Load 2,000 kVA | |
| Gas | Argon gas (flow rate 2000L/min) + Purified gas Freon R22 (flow rate 100L/min) |
| Required space | L27 × W12 × H8m |
Related Products
Dalian Base: No. 30, Huantai West Street, Yingchengzi Industrial Park, Ganjingzi District, Dalian City
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
Dalian Base: No. 40 Yingri Road, Ganjingzi District, Dalian, Liaoning Province
Wuxi Base: No. 15 Jinghong Road, Xishan District, Wuxi, Jiangsu Province
Tel: +86-510-68088419
Stock Code
920368
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