Products and Services


The company's business areas involve semiconductor and solar PV monocrystalline silicon growth and silicon wafer cutting and grinding equipment, solar PV silicon wafers, cell cleaning, texturing, etching, module string welding, stack welding equipment, semiconductor thin film growth equipment (ALD) PECVD, LPCVD, etc., new semiconductor material crystal growth and cutting and grinding equipment such as sapphire and SiC, as well as silicon material microwave heating and crushing, argon gas purification and recovery equipment. At the same time, the company has the ability to provide solutions and software and hardware delivery for solar PV smart manufacturing and smart factories under the background of Industry 4.0.

Vertical induction furnace for silicon carbide synthesis
Tubular SIC Powder Synthesis Furnace
Electrical Resistance Heating  SIC  Crystal Growing Furnace
Inductive Heating SIC Crystal Growing Furnace
Electrical Resistance Heating SIC Crystal Growth Furnace with Single Heater
Electrical Resistance Heating SIC Crystal Growth Furnace with Dual Heaters
Liquid Phase SIC Crystal Growing Furnace
Horizontal Epitaxial Growth Furnace for SIC Substrate
Annealing Furnace
SIC Diamond Wire Cutting Machine
CNC Flat Grinding Machine
CNC Rolling and Grinding Machine
SIC Slicer

Vertical induction furnace for silicon carbide synthesis


Suitable for the synthesis of high-purity SIC raw materials.
SIC Powder purity ≥6N.

Tubular SIC Powder Synthesis Furnace


Suitable for the synthesis of high-purity SIC raw materials.
SIC Powder purity ≥6N.

Electrical Resistance Heating SIC Crystal Growing Furnace


Used for 6/8/12 inch conductive and high purity semi-insulating SiC crystal growth, the multi-heater design allows flexible process and thermal field settings, the top loading structure enables convenient open-loading furnace and maintenance operations, while the equipment has high-precision temperature and pressure control capabilities, stable and excellent process performance.

Inductive Heating SIC Crystal Growing Furnace


Suitable for 6-inch and 8-inch conductive and high-purity semi-insulating SiC crystal growth, innovative structural design to provide high-purity material growth capability, with high-precision temperature and pressure control capabilities, excellent process performance, good equipment consistency, and rich experience in mass production.

Electrical Resistance Heating SIC Crystal Growth Furnace with Single Heater


Used for 6/8/12 inch conductive and high purity semi-insulating SiC crystal growth, the multi-heater design allows flexible process and hot zone options, the top loading structure enables convenient furnace loading and maintenance operations, while the equipment has high-precision temperature and pressure control capabilities, stable and excellent process performance.

Electrical Resistance Heating SIC Crystal Growth Furnace with Dual Heaters


Used for 6/8/12 inch conductive and high purity semi-insulating SiC crystal growth, the multi-heater design allows flexible process and hot zone options, the top loading structure enables convenient furnace loading and maintenance operations, while the equipment has high-precision temperature and pressure control capabilities with stable and excellent process performance.

Liquid Phase SIC Crystal Growing Furnace


Suitable for producing high quality 6-inch and 8-inch SIC crystal growth

Horizontal Epitaxial Growth Furnace for SIC Substrate


Suitable for producing high quality 6-inch and 8-inch SIC EPI

Annealing Furnace


Suitable for SIC crystal annealing process

SIC Diamond Wire Cutting Machine


Suitable for SIC crystal Cutting-off process

CNC Flat Grinding Machine


Suitable for SIC crystal Surface granding process

CNC Rolling and Grinding Machine


Suitable for SIC crystal body granding process

SIC Slicer


This product is a special processing equipment for cutting SIC wafers using diamond wire, and can process 6-inch and 8-inch wafers , with a maximum processing length of 300mm.
Vertical induction furnace for silicon carbide synthesis
Tubular SIC Powder Synthesis Furnace
Electrical Resistance Heating  SIC  Crystal Growing Furnace
Inductive Heating SIC Crystal Growing Furnace
Electrical Resistance Heating SIC Crystal Growth Furnace with Single Heater
Electrical Resistance Heating SIC Crystal Growth Furnace with Dual Heaters
Liquid Phase SIC Crystal Growing Furnace
Horizontal Epitaxial Growth Furnace for SIC Substrate
Annealing Furnace
SIC Diamond Wire Cutting Machine
CNC Flat Grinding Machine
CNC Rolling and Grinding Machine
SIC Slicer

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